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is a newer, open-source software that is gaining popularity. It is also free and offers batch operations. If you need to process dozens of spectra in an automated way, KherveFitting may be a better choice. However, for its simplicity, small file size, and straightforward workflow, XPS Peak Fit 4.1 remains incredibly popular.

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: Supports multiple peak shapes and background subtractions (Shirley, Tougaard, and Linear). is a newer, open-source software that is gaining popularity

Fix the ratio based on quantum mechanics (e.g., 2:1 for -orbitals, 3:2 for -orbitals). is a newer